Solid state: X-ray lithography breaks the submicrometer barrier; A new X-ray lithography system allowed Bell Labs engineers to make the smallest, fastest MOSFETs yet reported

Device engineers at Bell Labs have used a new X-ray system to make circuits with MOSFETs that are among the smallest and fastest digital devices ever reported. The MOSFETs have channel lenghts of 0.3 to 0.4 micrometer switching speeds of 30 to 75 picoseconds, and speed-power products of 5 femtojoules (5 × 10-15 Ws) to 50 femtojoules.