The Effects of Proton-Defect Interactions on Radiation-Induced Interface-Trap Formation and Annealing

Interface-trap buildup and annealing are examined as a function of temperature, dose rate, and H
₂
concentration using a physics-based model. The roles of a number of common oxide defects in radiation-induced interface-trap buildup are evaluated under various conditions. Defects near the interface play a significant role in determining interface-trap buildup by trapping protons as proton concentration and temperature increase.