Simulation of integrated electromagnetic device systems

The simulation of integrated electromagnetic sensors and actuators can be performed in conjunction with the electronics to simulate a complete microsystem. A reluctant micro-relay and an inductive displacement sensor are characterized using finite elements. Macro-models using extracted parameters are coded with analog hardware description languages for circuit simulators, with the goal of global system simulation and optimization. The methodology is applicable to all integrated and hybrid transducers which can be modeled using a discrete variable formulation.