Magnetically-excited flexural plate wave device

Novel devices have been designed, fabricated, and tested that use the Lorentz force to excite flexural plate waves in a silicon nitride membrane. Single and dual port devices have been fabricated and the excitation spectra measured. Eigenmodes of the membrane are excited in this resonant device and non-linear effects, due to amplitude stiffening of the membrane, are observed. The effects of temperature and ambient gas on resonant frequency and Q have been explored. These devices have the advantage of material compatibility with silicon process technology and are capable of operating at very high temperatures.