High-efficiency elliptical-slot silicon RFIC antenna with quartz superstrate

This paper presents a W-band on-chip elliptical slot antenna fabricated in the IBM CMOS8RF (0.13 μm) process. Improved antenna efficiency is achieved using a 400 μm quartz superstrate, which increases antenna gain from -5.7 dB to 0.5 dB. The superstrate-loaded antenna has a measured impedance bandwidth of 3.9% and an estimated efficiency of 26%.