A micromachined centre-fed slotted waveguide antenna for mm-wave applications

This paper presented the design of a 300 GHz slotted waveguide antenna centrally fed through a WR-3 rectangular waveguide. The antenna is designed for manufacturing using a multilayer SU-8 based micromachining technique. Different from conventional iris based junctions, a cavity based junction is implemented as the waveguide power divider. Being centrally fed, the antenna can be more conveniently connected to the metal waveguide flange with a shortened feeding waveguide. This significantly reduces the associated loss in the feeding network, which is critically important for waveguide antennas at such high mm-wave frequencies.