Minimizing electrostatic charge generation and ESD event in TFT-LCD production equipment

This paper reports the results of investigations into electrostatic charging effects of a separation between glass and stage in TFT LCD manufacturing process. Generated electrostatic charge is closely related with vacuum pressure to hold the glass, holding times, separation cycles, and lift pin up height/speed. Therefore, effects on these factors are studied and a correlation between ESD damage and lift pin materials is analyzed. To avoid ESD damage and to minimize the charge generation during separation process, we suggest that the optimization of process condition and materials are required in addition to grounding and ionization.