Spark erosion for fabrication of micromechanical components-evaluation of possibilities and limits

In recent years spark erosion (EDM) has increased to a high precision machining technology and a powerful tool for fabrication of microstructures. The improvements are as a result of systematic research of different electrode materials, influences of various dielectric liquids on the erosion process, as well as due to improved control and machine features. This paper gives an overview of the characteristics, possibilities and limits of Spark Erosion (Electro Discharge Machining) in the field of microstructuring.