Fabrication and crystallization of AAO template for sensor applications

In this study, AAO templates were fabricated by two steps anodizing processes and then crystallized. For the crystallization, TG/DTA analysis was performed and determined crystallizing condition. The structural properties were observed for the using host material of nanometer scale device like humidity sensor or gas sensor etc. by Scanning electron microscope (SEM), X-ray diffraction patterns and transmission electron microscope (TEM). The crystallized AAO layer showed the typical XRD pattern of polycrystalline structure with the γ-(Al
₂
O
₃
)
_1.333
phase. And through the selected area electron diffraction (SAED) patterns showed that the AAO was crystallized.