Multimode interference (MMI) waveguides-based photonic modulators integrated on SOI substrates

Multimode interference (MMI) waveguides-based photonic modulators integrated on silicon-on-insulator (SOI) substrates are designed, fabricated and evaluated. With 100% modulation depth achieved, the lowest rise and fall times were respectively measured to be 52 and 48 ns. The highest 3 dB bandwidth in the excess of 6.5 MHz was determined from the corresponding devices.