Fabrication, laser structuring and field emission properties of carbon nanowalls

We have synthesized carbon nanowalls (CNWs) on Si substrate by inductively/capacitively coupled plasma enhanced chemical vapor deposition (ICP/CCP-PECVD). The shape and density of CNWs are controlled by adjusting the synthesis parameters. Local field emission measurements of Ø 30 μm spots reproducibly yielded stable current up to 1 μA. Integral pulsed measurements results on the unstructured cathodes showed fairly homogeneous emission and current density of at least 3 mA/cm
²
at 5.6 V/μm, limited by the power load on the phosphor screen. In order to get cathodes for gate controlled devices and to improve the emission homogeneity, structuring by laser was performed.