Stability measurement of neon ion beam current emitted from supertip gas field ion source

So far, focused ion beam (FIB) has been contributed to the development of nanotechnology. However, liquid metal ion source (LMIS) equipped on commercial FIB systems has a serious problem which is the pollution of sample surfaces due to irradiated ion species. To develop the pollution-free and high-brightness ion source, we have focused on noble-gas field ion source (GFIS) and have developed the practical use of Ne- or Ar-GFIS. In this study, we report the stability of Ne ion current emitted from a supertip prepared by a modified field-induced oxygen etching.