Moving Horizon Observer for vibration dynamics with plant uncertainties in nanopositioning system estimation

This paper considers the estimation of states and parameters of a Single-Degree-of-Freedom (SDOF) vibration model in nanopositioning system based on a nonlinear Moving Horizon Observer (MHO). The MHO is experimentally tested and verified on measured data. The information about the displacement and speed together with the system parameters and unmodeled force disturbance is estimated through the Sequential Quadratic Programming (SQP) optimization procedure. The MHO provided superior performance in comparison with the benchmark method Extended Kalman Filter (EKF) in terms of faster convergence.