A very low loss 1.9–2.1 GHz RF MEMS phase shifter

This paper presents the design, fabrication and test of a very low loss phase shifter built using the wiSpry RF MEMS switched capacitor. The phase shifter covers > 360° at 1.9–2.1 GHz with an insertion loss of 1.1+/−0.6 dB over all phase states. The measured linearity shows an IIP3 > 46 dBm over all phase states. The phase shifter has a measured power handling of 1 W before any self-actuation occurs. To our knowledge, this is the lowest loss phase shifter at 2.0 GHz using any technology.