Integrated active miniature sensors for electro-magnetic near field measurement

Integrated electric dipole and magnetic loop probes together with active electronics in AlGaAs/GaAs-HEMT and SiGe:C-HBT technologies are presented. While the probes allow for a spatial resolution in the 100 μm range, integrated amplifiers provide about 30 dB gain over a bandwidth of about 10 GHz. Switchable double probe sensors enable the measurement of two field components at each position.