Powwer supply on chip (integration of inductors and capacitors with active semiconductors)

The paper introduces the concept of power supply on chip (PwrSoC) which will enable the development of next generation, functionally integrated, power management platforms with applications in dc-dc conversion, gate drives, isolated power transmission and ultimately, high granularity, on-chip, power management for mixed-signal, SOC chips. PwrSoC will integrate power passives with the power management IC, in a 3D stacked or monolithic form factor, thereby delivering the performance of a high efficiency dc-dc converter within the footprint of a low efficiency linear regulator. A central element of the PwrSoC concept is the fabrication of power micro-magnetics on silicon to deliver micro-inductors and micro-transformers. The paper details the magnetics on silicon process which combines thin film magnetic core technology with electroplated copper conductors. Measured data for micro-inductors show inductance operation up to 20MHz, footprints down to 0.5mm
²
, efficiencies up to 93% and dc current carrying capability up to 600mA. Measurements on micro-transformers show voltage gain of approximately −1dB at between 10MHz and 30 MHz.