Processes of material surface modification under combined treatment by pulsed ion beams of different power and plasma flows

The investigations results are presented for some processes occurring at different stages of strong adhesion coatings and modified layers creation with the use of high-dose implantation and deep diffusive doping of elements under pulsed energetic impact. The investigations have been carried out on the installation providing the possibility of combined materials treatment with pulsed ion beams of power density ranged from 10
³
to 10
⁸
W/cm
²
. The facility includes the accelerator of high-power ion beams and the sources of repetitively-pulsed metal ion beams and metal plasma flows.