High-resistivity SNS Josephson junctions scribed in YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// by electron irradiation

We demonstrate that the behavior of Josephson junctions scribed in YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (YBCO) with a high-brightness electron source are described well by conventional superconductor-normal-superconductor (SNS) theory. These junction characteristics include a fully normal interlayer (T/sub cN/=0), intermediate length (L//spl xi//sub n/(T/sub c/)/spl ap/8-10), and a reduced order parameter at the SN interface. Consistent application of this model of diffusive transport across a metallic interlayer in the dirty limit requires a reduced carrier concentration in the irradiated region, a junction length L/spl ap/5 nm, and a normal resistivity near the metallic limit. I/sub c/R/sub n/ products higher than 3 mV at low temperatures are observed.