A high efficient and compact charge pump with multi-pillar vertical MOSFET

A new charge pump with the multi-pillar VMOS has been proposed and its performances for different ratio of the pillar diameter and the pillar space in the multi-pillar have been evaluated. As the results, it is clarified that the proposed charge pump realizes the best performances when the ratio is 1. The proposed charge pump realizes a 24% increased output current with 2.88% improved efficiency and a 0.7V higher VPP with 19% shorter VPP generation time than the conventional charge pump with the single-pillar VMOS.