A New Approach Based on a Least Square Method for Real-Time Estimation of Cantilever Array Deflections with an FPGA

Atomic force microscopes (AFM) provide high resolution images of surfaces. In this paper, we focus our attention on an inter ferometry method for deflection estimation of cantilever arrays in quasi-static regime. In its original form, spline interpolation was used to determine interference fringe phase, and thus the deflections. Computations were performed on a PC. Here, we propose a new complete solution with a least square based algorithm and an optimized FPGA implementation. Simulations and real tests showed very good results and open perspective for real-time estimation and control of cantilever arrays in the dynamic regime.