Compact capacitor charger using resonant MOSFET inverter

Repetitive pulsed power system, which are operated with long lifetime and compactness, have been developed to be used for repetitive applications, such as excimer laser, high energy density plasma (EUV sources) and pulse ozonizer. Furthermore, necessary of these applications are fast charging a capacitor and high stability. Recently, semiconductor power device technology has improved the performance of fast high frequency switching and low switching loss. In particular, power metal oxide semiconductor field effect transistor (MOSFET) is the fastest switch in the semiconductor switching device. We have studied and developed small size a capacitor charger for pulsed power generator. This charger consists of a convertor circuit, a resonant inverter, a high frequency step-up transformer and a control circuit. Input voltage is 100 V AC. Maximum output voltage is 1500 V DC. This power supply rectifies the incoming plug in AC power, generate a high frequency (200 kHz) AC waveform through the operation of a series-resonant inverter, and finally transform and rectify the high-frequency AC waveform to the desired output. The highest-power-regulation, most reliable and lowest cost series resonant inverter uses Power MOSFET to generate the high frequency from a DC bus. The high frequency waveform allows the use of smaller, lighter transformers to achieve the desired high-voltage output level, which is rectified using fast-recovery diodes.