Development of MEMS varactor for selectable-band patch filter

The use of MEMS as tuning elements is interesting for their higher performance in terms of loss and nonlinearity. Here, MEMS varactors are integrated to a patch filter through a flip-chip process in order to change the filter center frequency. The selected frequencies are the ones assigned to WiMAX frequency bands at 2.5 GHz and 3.5 GHz.