Modeling and analysis of coplanar waveguide (CPW) based multilayer on-chip inductors

CPW based multilayer inductors which can provide higher frequency band and Q factor value are studied and characterized so that a new microwave Equivalent circuit model may be found. In order to study the correlation between the inductance and the length, width and thickness of the conductor, EM structures of multilayer inductors are designed and compared of electrical models. Data analysis and graphic comparison of inductance, S-parameter will be collected and shown.