Self-aligned fabrication process for active membrane made of photosensitive nanocomposite

In this paper, we propose a simple fabrication technique for making active membranes as micro-actuators on a chip. By controlling three important factors consisted of the thickness of the exposure, the thickness of spin coat at surface, and the total thickness of the nanocomposite coated on a substrate, we simply form and release an active membrane layer without an alignment process. The active membrane fabricated by the proposed method actuated with the maximum displacement of 300nm at the magnetic field of 65kA/m and had good controllability.