Fabrication of stretchable and flexible electrodes based on PDMS substrate

We developed a simple and reliable fabrication method to realize electrically and mechanically stable stretchable and flexible metal patterns based on PDMS substrate using an intermediate thin film layer. The mechanical and electrical stability of the fabricated electrodes were characterized under dynamic/static bending and stretching deformation on a custom-designed test module and a push pull gage tester. Also the adhesion between contact layers such as PDMS, parylene and metal layers was evaluated using adhesion tape test method. Based on these results, we believe that the proposed fabrication method would contribute to flexible electronics and MEMS applications.