Three dimensionally structured transducers for chemical and biochemical sensors

Chemical sensors and biosensors based on three-dimensionally structured silicon transducers have been developed. With the inclusion of the third wafer dimension some severe problems related to the combination of IC-fabrication technologies and the technologies for the integration of membranes and biological sensor components have been minimized. Two transducer concepts are presented which both are full mass-production compatible in all fabrication steps. With the inclusion of the third wafer dimension more flexibility is achieved for the integration of sensors in /spl mu/TAS modules and microsystems. Measurement results of the sensors are presented for environmental and medical applications.