Selective growth of MWCNT on patterned tungsten at room temperature using oxygen plasma and photo-resist

A unique method of growing multi-walled carbon nanotubes (MWCNT) on patterned tungsten regions at room temperature is presented. This technique involves converting photo-resist (PR) on tungsten to CNTs using an oxygen plasma process. Interestingly, regions with PR on un-patterned tungsten do not produce CNTs. Additionally, a CNT density gradient is observed due to “hot spots” created on convex regions of patterned tungsten. These hot spots may be caused by large plasma E-fields in convex regions acting as “lightening” rods. This method can be used to deposit CNTs on patterned metals on plastics and other low temperature substrates.