Combining CMOS and MEMS technologies in a monolithic system for observing filter pollutions

The combination of CMOS and MEMS technologies in principle opens new potentials for the creation of complex, compact, reliable solutions. Within the current research work a “SmartFilter” module to observe the pollution of filters in suction and filtering systems has been developed, provided with piezoresistive pressure sensor, controller core, power management, digital and analog signal processing as well as an RFID interface to allow wireless transfer of energy and data. The system design, the RFID-frontend including an antenna, aspects of analog signal design and packaging are discussed. Basis of the innovation is the integration of a pressure sensor fabrication module into a modern 350 nm CMOS mixed-signal semiconductor technology.