Design and experimental verifications of an integrated micro-gyroscope

An integrated Z-axis micro-gyroscope is proposed in this paper. At first, the details of the mechanical structure design and dynamical analysis of micro-gyroscope is thoroughly discussed. The proposed micro-gyroscope is fabricated by the proposed high-aspect-ratio silicon-on-insulator bulk micro-machining process and integrated with the CMO S drive/sense ASIC by direct wire bonding. Finally, the preliminary experimental results of the presented integrated micro-gyroscope are examined and discussed.