Ge/SiGe Quantum Well Waveguide Modulator Monolithically Integrated With SOI Waveguides

We report a Ge/SiGe quantum well waveguide electroabsorption modulator that is monolithically integrated with silicon-on-insulator waveguides. The active quantum well section is selectively grown on a silicon-on-insulator substrate and has a footprint of 8 . The integrated device demonstrates more than 3.2-dB contrast ratio with 1-V direct voltage swing at 3.5 GHz. We also show the potential of this device to operate in the telecommunication C-band at room temperature.