Meso-scale actuator design for the integrated dynamic alignment of a lenslet array within a package

This paper describes the design of an LTCC-process compatible meso-scale actuator for the six degrees of freedom dynamic adjustment of micro-optical components, in particular the alignment of a microlens array on top of a UV-LED array. The lens array is specified to have an active area of 3mm × 3mm, the GaN array is 5mm × 5mm × 450μm. The focal length is 65μm. The actuator must enable the collimation or the focusing of the optical beams emanating from the LED array.