SEM-EDX investigations of magnetron sputtered ZnO thin films

Zinc oxide (ZnO) is a promising electronic material for transparent electronic applications including thin-film sensors, transistors and solar cells. In this work, we investigated the influence of direct current (DC) magnetron sputtering process parameter on ZnO films using scanning electron microscopy (SEM). The experimental results reveal an enhancement of the structural properties with increasing argon (Ar) pressure. The influence of the Ar pressure will be discussed in this paper.