Micromachined probes for on-wafer characterization of terahertz and submillimeter-wave components

A micromachined coplanar waveguide probe for performing on-wafer measurements of planar devices in the WR-1.5 waveguide band (500-750 GHz) is described. The probe is fabricated using a silicon-on-insulator process and is scalable to terahertz frequencies.