A comparative study of computation models for dynamic behaviour of MEMS structures

A comparative study of computation models for predicting the vibration modes of some MEMS structures of cantilever type - as suspension arms of the inertial mass of a bulk-micromachined silicon accelerometer, reported to the experimentally measured values of resonance (natural) frequencies, is presented in this paper. The most appropriate values of silicon Young's modulus depending on the crystal orientation of the structure and the type of model, including also the dynamic Young's modulus determined by the authors, have been inferred.