Micro-nanostructural and composition characterization of ZnO: Al doped films by SEM-EDX and HRTEM-EDX

We present the results of a structural and compositional investigation of Al-doped thin films obtained by sol-gel deposition on Si/SiO
₂
substrates. Taking into consideration the layer by layer deposition process and that the films contain 1-10 successive layers, the evolution of structure and elemental composition, especially Al concentration in the films were investigated by energy dispersive X-ray analyses in the scanning and high resolution transmission electron microscopy. Qualitative composition of the structures observed in the films have been evidenced in the elemental maps.