3DOF parallel type of ultra precision manipulator using flexure hinge joint

We present the 3-DOF parallel type of ultra precision manipulator for high precision positioning. In order to find the design parameters of the manipulator, the forward and inverse kinematic analyses and design optimization process are done. Proposed 3-DOF manipulator in this paper consists of the piezoelectric actuator, amplifier mechanism with flexure hinge. The piezoelectric actuator has high resolution, good response and large force for its size. Small motion range of PZT actuator is problem to make the manipulator have enough moving range. Therefore amplifier mechanism is designed to extend the motion range of piezoelectric actuator by using shape optimization. The amplification ratio M.A.(Mechanical Advantage) of amplifier mechanism is 6.67 by FEM and 5.54 by experiment. The design process is verified through the comparison with the results of experiment.