Reduction of nuisance rate in inspection using review/inspector cycle optimization methodology

• Review/Inspector Cycle Optimization Methodology : □ Integrate the parameters of the inspection machine and review images at the same time. Nuisance rate is reduced significantly, and therefore the sensitivity and productivity of inspectors and review tools are also improved. • Suppress the Bright Field Inspection Nuisance Rate: □ Base on the reviewed patch images information and feasible threshold setting, pre-layer defect types and nuisance are suppressed effectively by review/inspector cycle optimization process. 45nm SDAP process false rate changes from 20% to 3%, and STI etching false rate changes from 45% to 10%, respectively. • Increase the DOI Capture Rate : □ After suppressing the nuisance and false rate, it is more easily found more defect types during review processes. Thereby, the capture rate of DOI are increased. □ The DOI tiny bridge defects of PL3 hardmask increase from 14% to 44% in SADP process. • Speed up the Bright Field Inspection Recipe Setting and Process Development □ In order to gain the time to market, review/inspector cycle optimization function was implemented the in review tool, it not only saves the time for recipe optimization, but also speed up process development due to find out the DOI and resolve it immediately.