An intelligent design of electron lens system

At present, the main work of electron optical system CAD is solving equations and calculating mumerical values. However, the design perhaps needs more inference and expertise than numerical calculations because the structure of electron lens system is complicated. In this paper, a primary expert system is applied to design the electron lens system intelligently. This expert system is combined with SEU-3D program which is used to simulate the electron optical system to optimize the electron lens systems. In spite of this, the expert system which is established in this paper can also be used to diagnose the electron lens system. Although the knowledge base is small and rules are not abundant, this paper has used this system to obtain some very useful results. The initial success with this system suggests that further work need to be done whether more rules and knowledge will be added to extend the ability of expert system.