The application of ion beam implantation for synthetic diamond surface modification

Summary form only given. The ion beam implantation for surface modification of synthetic diamond tools and natural diamond have been widely investigated in previous work. In this article, the ion beam implantation for surface modification of synthetic diamond powder at the Southwestern Institute of physics is described. The nitrogen ion and titanium ion with energies of 20-70 keV have been chosen as the implantation ions, the experiment performed in the multifunction implanter which was developed by ourself. The ion depth distribution and microstructure have been tested by XRD (X-ray diffraction). It shows that the implanted ions have a good chemical combination with the surface saturationless bond carbon atom.