Hybrid ${\rm As}_{2}{\rm S}_{3}$ Mach-Zehnder Interferometer Prepared by Magnetron Sputtering and its Photodarkening Effect

Several hybrid integrated As
₂
S
₃
Mach-Zehnder interferometers with linear tapers and grating couplers have been successfully fabricated using magnetron sputtering on LiNbO
₃
substrate. It demonstrated how As
₂
S
₃
waveguide can be integrated with the LiNbO
₃
waveguide to create a hybrid interferometer for use in chalcogenide photonics. The photo-induced changes in the group and effective index of the As
₂
S
₃
waveguide were measured and compared to values reported for films prepared by thermal evaporation. These photo-induced phenomena are found to be different from those reported for As
₂
S
₃
bulk glass and thermally evaporated As
₂
S
₃
film.