Integration for All Configurations

In this article, we have reported the fabrication and characterization of some basic building block of a new type of CNT-array based BEOL: vias using vertical dense arrays of semiconducting CNTs and RF MEM switches using horizontal dense arrays of a mixture of metallic and semiconducting tubes. A density of CNTs up to 2.5 1012 cm~2 is reported in 1 μm diameter vias, which is, to our best knowledge, the highest density so far achieved. The CNT horizontal membranes have a Young's modulus of the order of 8.5 GPa and a resistiv ity of 0.0083 Ω cm, respectively, these are by far not optimized but they offer for the first time the possibility to build a fully functional capacitive RF MEM switch. RF measurements of the mechanical switch show isolation higher then 10 dB at high frequency (up to 6 GHz) and a low actuation voltage (less than 10 V). The reported electrical and mechanical properties are unique compared to metal-based RF MEM switches and, after further optimization, seem to hold promise for future improved performance and novel functionality.