Cantilever actuator processing to control photoluminescence of quantum wells coupled across nanoscale air gaps

A nanomechanical actuator was fabricated to control the electron states of quantum wells coupled across air gaps. This actuator was composed of a collapsed cantilever containing quantum wells and a set of parallel plate electrostatic actuators. The actuators were designed to alter the coupling distance between the wells by a few nanometers over a 200nm gap. The actuation region is separated from the quantum coupling regions so that Stark effect interference is avoided. Preliminary raw data suggests actuator motion. Such an actuator may be applied to infrared photodetectors with wide tuning ranges.