Syntheses of (Pb-Sn-Ti)O3 thin films by PLD method and their structural and ferroelectric properties

(Pb-Sn-Ti)O
3
(PST) thin films are fabricated by the pulse laser deposition method with three ceramic targets of PbO, SnO and TiO
2
with consecutive sequences of deposition. Lattice parameters of PST thin film are a=b=0.3993 nm, c=0.4048 nm. This fact together with TEM-EDX results suggests that PST films are the mixed state of PbTiO
3
-SnTiO
3
-PbSnO
3
. Real part of dielectric constant and remanent polarization are determined to be about 1000 and 35µC/cm
²
at room temperature, respectively. X-ray diffraction reveals that a structural phase transition takes place at 600 °C. Piezoelectric response is confirmed by a piezo-force scanning microscope.