Structural investigation of LN/LT1 superlattice thin films by field effect scanning transmission electron microscopy equipped with electron disspersive x-ray spectroscopy

Superlattice thin films are fabricated by the pulsed laser deposition method using LiNbO
3
and LiTaO
3
as target members. Through our structural and compositional analyses by x-ray diffractometry and field effect scanning transmission electron microscopy with electron dispersive x-ray spectroscopy, these films are found to contain Li-deficient phase, i.e. LiNb
3
O
8
and LiTa
3
O
8
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