Wideband RF nano switch matrix

This paper presents, for the first time, a RF nano switch matrix cell for 0-50GHz wideband applications. The RF nano switch matrix cell can be used to implement scalable RF nano switch matrix. The single cell unit is designed with four metals structures on alumina substrate. Simulation results indicate that the designed RF nano device can potentially achieve good RF performance in the frequency range of interest. Surface micromachining is developed to fabricate the proposed nano matrix cell. Fabrication leverages standard ICs process has potential to realize hybrid-integration of RF nano devices with RFIC circuits.