Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO
₂
for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.