Multi variation mapping for Dynamic Laser Stimulation analysis

Dynamic Laser Stimulation is now widely used for soft defect issues and is generally based on the study of device under test functionality (pass or fail). Automatic Test Equipments (ATE) are able to collect a lot of electrical parameters about device under test status but actually only the pass/fail is exploited and mapped has function of the laser beam position. Multi variation mapping (MVM) for Dynamic Laser Stimulation analysis gives the possibility to get all the data in same time than pass/fail and is able in one acquisition to give one mapping per data. Therefore MVM for Dynamic Laser Stimulation analysis offers the unique opportunity of collecting in one scan all the data necessary for a deep integrated circuit analysis.