Ta/Si bilayer thin film for write-once blue laser optical recording media

Ta/Si bilayer thin films were prepared by magnetron sputtering. The recording mechanism and dynamic tests for write-once blu-ray disc (BD-R) are investigated. Thermal analysis shows that the Ta/Si bilayer thin film has a reflectivity change with the temperature ranging from 130°C to 300°C. It was found that the as-deposited phase of Ta/Si bilayer film was Ta phase and it would transform to Ta and TaSi
₂
coexisting phases after annealing at 350°C for 30 min. Dynamic tests show that the Ta/Si bilayer thin films are suitable for BD-R.