Study on the control system of piezoelectric ceramics micro-positioning stage

Based on the nonlinearity of the piezoelectric devices such as hysteresis and creep, posioning control of the piezoelectric ceramics micro-positioning stage gets difficult. The multiple control scheme that a feedforward control based on model combines with a fuzzy self-adjusting PID(proportion-integral-derivative) control is proposed. Matlab6.5 software is acted as experimental development platform, and the control scheme is implemented in it. The result showed that positioning accuracy and regulation speed of the control system is satisfied.