2-DOF kinematic XY stage design based on flexure element

This paper presents a planar motion stage design based on flexure element that allow large ranges of motion along x and y direction without causing over-constraint or significant error motions. From comparing the conventional XY stage with the flexure-based compliant XY stage, the main bottleneck for the flexure-based compliant XY stage is parasitic motion because of inherent characteristics of flexure element. Based on the constraint analysis, new mechanism is designed to eliminate the parasitic error, and piezoelectric actuator is used to improve the positioning resolution.